Methods to fabricate chamber component holes using laser drilling

ABSTRACT

Embodiments of a method of forming one or more holes in a substrate for use as a process chamber component are provided herein. In some embodiments, a method of forming one or more holes in a substrate for use as a process chamber component include forming the one or more holes in the substrate with one or more laser drills using at least one of a percussion drilling, a trepanning, or an ablation process, wherein each of the one or more holes have an aspect ratio of about 1:1 to about 50:1, and wherein the substrate is a component for gas delivery or fluid delivery.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation-in-part of U.S. patent application Ser. No. 17/090,770, filed Nov. 5, 2020, which claims benefit of U.S. provisional patent application Ser. No. 63/091,759, filed Oct. 14, 2020, both of which are herein incorporated by reference in their entirety.

FIELD

Embodiments of the present disclosure generally relate to substrate processing equipment.

BACKGROUND

Deposition and etch chambers (process chambers) are typically used in the manufacturing of semiconductor devices. Some substrates disposed within these process chambers include holes. For example, a gas distribution plate for use in a process chamber may include holes with high aspect ratios to distribute one or more process fluids within the process chamber. Holes with high aspect ratios reduce or prevent plasma backflow. Traditional methods of fabricating these holes utilize a mechanical method such as ultrasonic impact grinding or mechanical drilling. However, these methods have to be done slowly to avoid damage and meet tolerance requirements, and therefore, are expensive.

Accordingly, the inventors have provided improved methods and apparatus for forming holes through a substrate for use as process chamber components.

SUMMARY

Embodiments of a method of forming one or more holes in a substrate for use as a process chamber component are provided herein. In some embodiments, a method of forming one or more holes in a substrate for use as a process chamber component include forming the one or more holes in the substrate with one or more laser drills using at least one of a percussion drilling, a trepanning, or an ablation process, wherein each of the one or more holes have an aspect ratio of about 1:1 to about 50:1, and wherein the substrate is a component for gas delivery or fluid delivery.

In some embodiments, a method of forming one or more holes in a substrate for use in a process chamber, includes: placing the substrate on a substrate support, wherein the substrate is a gas distribution plate comprising silicon; and forming the one or more holes in the substrate with one or more laser drills using at least one of a percussion drilling, a trepanning, or an ablation process.

In some embodiments, an apparatus for forming holes in a substrate for use in a process chamber, including: a substrate support having one or more retaining surfaces for holding the substrate and a central opening to expose a bottom surface of the substrate, wherein the substrate support is configured to at least one of translate along an elongate axis of the substrate or rotate about a central axis of the substrate support; and one or more laser drills disposed at least one of above or below the substrate support, wherein the one or more laser drills are configured to direct photon energy towards the substrate with a pulse duration of about 1.0 nanosecond or less and with a pulse energy of about 1.0 to about 8.0 millijoules.

Other and further embodiments of the present disclosure are described below.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present disclosure, briefly summarized above and discussed in greater detail below, can be understood by reference to the illustrative embodiments of the disclosure depicted in the appended drawings. However, the appended drawings illustrate only typical embodiments of the disclosure and are therefore not to be considered limiting of scope, for the disclosure may admit to other equally effective embodiments.

FIG. 1 depicts a flowchart of a method of forming holes in a substrate for use in a process chamber in accordance with some embodiments of the present disclosure.

FIG. 2A depicts a schematic side view of a single-side hole forming apparatus in accordance with some embodiments of the present disclosure.

FIG. 2B depicts a schematic top view of a single-side hole forming apparatus in accordance with some embodiments of the present disclosure.

FIG. 3A depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure.

FIG. 3B depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure.

FIG. 3C depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure.

FIG. 4 depicts a cross-sectional view of a substrate in accordance with some embodiments of the present disclosure.

FIG. 5 depicts a schematic side view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure.

FIG. 6 depicts a schematic partial isometric view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure.

FIG. 7 depicts a schematic side view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure.

FIG. 8 depicts a flowchart of a method of forming holes in a substrate for use in a process chamber in accordance with some embodiments of the present disclosure.

To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. The figures are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

DETAILED DESCRIPTION

Embodiments of methods and apparatus of forming one or more holes in a substrate for use as a process chamber component are provided herein. The substrate may a component for gas or fluid delivery, for example, a gas distribution plate, a showerhead, an upper electrode, a cooling plate, or any other suitable process chamber component having one or more holes therethrough. In some embodiments, the substrate may be a component for use in a plasma process chamber, for example, a dielectric etch process chamber. In some embodiments, the substrate may be a component for use in a deposition chamber. The methods and apparatus provided herein advantageously employ laser drilling to provide improved precision of holes (tolerance for hole diameter and true precision), and improved consistency from hole to hole and part to part. The methods and apparatus provided herein may also advantageously provide improved hole quality with reduced sub-surface damage which also results in elimination of other processing steps used in traditional methods, such as, for example, chemical etching and a polishing step.

FIG. 1 depicts a flowchart of a method 100 of forming holes in a substrate for use in a process chamber in accordance with some embodiments of the present disclosure. In some embodiments, the method 100 may be performed by using the hole forming apparatus 200 of FIG. 2A-2B. At 102, one or more holes are formed in a substrate (e.g., substrate 208) for use in a process chamber with one or more laser drills (e.g., one or more laser drills 215) using at least one of a percussion drilling, a trepanning, or an ablation process, wherein each of the one or more holes (e.g., one or more holes 214) have an aspect ratio of about 1:1 to about 50:1. In some embodiments, each of the one or more holes have an aspect ratio of about 10:1 to about 50:1. In some embodiments, each of the one or more holes have an aspect ratio of about 30:1 to about 50:1, or about 25:1 to about 50:1.

In some embodiments, the substrate is made of silicon, silicon carbide, aluminum, nickel, molybdenum, or a ceramic material. The substrate may be a gas distribution plate, a showerhead, an upper electrode, or any other suitable substrate for use in a process chamber having one or more holes therethrough. In some embodiments, the substrate has a thickness of about 0.70 mm to about 20 mm. In some embodiments, the substrate has a thickness of about 5 mm to about 20 mm. In some embodiments, the substrate has a thickness of about 8 to about 12 mm. In some embodiments, the substrate has a thickness of about 0.70 mm to about 10 mm. In such embodiments, the one or more holes may be formed via single-side drilling from a first side (e.g., first side 250) of the substrate to a second side (e.g., second side 260) of the substrate. In some embodiments, the substrate has a thickness of about 10 mm to about 20 mm. In some embodiments, the one or more holes may be formed via double-sided drilling from both the first side of the substrate and the second side of the substrate. In some embodiments, the substrate 208 has a substantially uniform thickness. In some embodiments, the substrate 208 may have a thickness that varies (e.g., see FIG. 4 ).

In some embodiments, a purge gas is advantageously directed to the one or more holes while drilling the one or more holes to purge out ablated material. The purge gas helps minimize re-deposition and helps to control a shape and dimension of the one or more holes. The purge gas may be directed to the one or more holes simultaneously while drilling the one or more holes. The purge gas may be introduced around a laser beam of the one or more laser drills and be directed directly to the one or more holes. The purge gas may be any suitable gas, for example an inert gas such as nitrogen gas or argon gas.

FIG. 2A depicts a schematic side view and FIG. 2B is a schematic top view of a top view of a single-side hole forming apparatus 200 for performing 102 in accordance with some embodiments of the present disclosure. The hole forming apparatus 200 includes a substrate 208 disposed on a substrate support 204. In some embodiments, the substrate support 204 may rotate about a central axis 212 to rotate the substrate 208. In some embodiments, the substrate support 204 is configured to move in a lateral direction 202 along an elongate axis orthogonal to the central axis 212 to move the substrate 208. The substrate support 204 may be supported by one or more legs 206. In some embodiments, the one or more legs 206 comprises two legs that are rotatably coupled to the substrate support 204 on either side of the substrate support 204. The substrate support 204 may move in the lateral direction 202 with respect to the one or more legs 206.

The substrate 208 includes a second side 260 facing the substrate support 204 and a first side 250 opposite the second side 260. The substrate support 204 includes one or more retaining surfaces for holding the substrate 208 and a central opening 228 to expose the second side 260, or bottom surface, of the substrate 208. In some embodiments, the one or more retaining surfaces is an annular ledge that extends into the central opening 228. In some embodiments, as shown in FIG. 2B, the one or more retaining surfaces include a plurality of mounting tabs 216 extending into the central opening 228.

One or more laser drills 215 are disposed above the substrate support 204. In some embodiments, the hole forming apparatus 200 includes an enclosure 210, where the substrate support 204 is disposed within the enclosure 210. In some embodiments, at least one of the one or more laser drills 215 are coupled to a top wall of the enclosure 210.

In some embodiments, the one or more laser drills 215 are configured to move in a lateral direction 226 (e.g., up/down/left/right) with respect to the substrate support 204. In some embodiments, the one or more laser drills 215 are configured to rotate with respect to the substrate 208 about a central axis 224 of the one or more laser drills 215. In some embodiments, the central axis 224 of the one or more laser drills 215 is parallel to the central axis 212 of the substrate 208. In some embodiments, the one or more laser drills 215 are configured to tilt along an axis orthogonal to the central axis 224 to perform off-axis drilling of the substrate 208 (see FIG. 3C).

The one or more laser drills 215 are configured to direct photon energy 222 to remove material from the substrate 208 to form one or more holes 214. In some embodiments, the one or more holes 214 are arranged in a suitable pattern for gas delivery or fluid delivery. For example, the one or more holes 214 may be one hole disposed at a central region of the substrate 208, a plurality of holes disposed at regular intervals along one or more circles, disposed in a rectilinear grid, disposed in a pattern having a greater concentration of holes in a peripheral region as compared to a central region, or any other suitable pattern. While FIG. 2B depicts the one or more holes 214 having a circular cross-sectional shape, the one or more holes 214 may have an oval, rectangular, or other cross-sectional shape.

In some embodiments, the one or more holes 214 include a plurality of sets of holes, where each set of the plurality of sets of holes include one or more holes that make up the one or more holes 214. For example, the one or more holes 214 includes a first set 252 of one or more holes (set of three holes shown in FIG. 2B). In some embodiments, each laser drill of the one or more laser drills 215 comprises a single laser head to form a single hole. In some embodiments, each laser drill of the one or more laser drills 215 comprises a plurality of laser heads to form multiple holes (e.g., the first set 252) simultaneously.

For single-side drilling, the one or more laser drills 215 face the first side 250 of the substrate 208. For two-sided drilling, in some embodiments, the one or more laser drills 215 face the first side 250 and the substrate 208 is then rotated so that the one or more laser drills 215 face the second side 260 of the substrate 208. In some embodiments, as discussed in more detail with respect to FIG. 7 , for two-sided drilling, the one or more laser drills 215 may comprise a single laser drill or an array of laser drills comprising similar laser drills oriented in the same direction. In some embodiments, the array of laser drills may include a single power source. In some embodiments, the array of laser drills may comprise a plurality of stand-alone laser drills oriented in the same direction. The substrate 208 may be rotated so that the single laser drill or the array of laser drills selectively face the first side 250 or the second side 260. In some embodiments, for two-sided drilling, the one or more laser drills 215 are disposed on either side of the substrate support 204 so that the one or more laser drills 215 face the first side 250 and the second side 260 of the substrate 208. Such a configuration is described in U.S. patent application Ser. No. 16/945,461, filed Jul. 31, 2020 and titled “METHOD OF FORMING HOLES FROM BOTH SIDES OF SUBSTRATE”.

FIG. 5 depicts a schematic side view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure. In some embodiments, a second drill 230 and a third drill 240 are disposed on opposite sides of the substrate support 204. In a two-side drilling position, as shown in FIG. 5 , the second drill 230 faces the first side 250 of the substrate 208 and the third drill 240 faces the second side 260 of the substrate 208. In some embodiments, the second drill 230 faces the second side 260 and the third drill 240 faces the first side 250. In such embodiments, the second drill 230 and the third drill 240 are used to drill first partial holes from the first side 250 of the substrate 208 to a first location disposed between the first side 250 and the second side 260 of the substrate 208 and to drill second partial holes from the second side 260 of the substrate 208 to the first location (described in more detail below in FIGS. 3B-3C). In some embodiments, the second drill 230 and the third drill 240 both form roughly half of each hole of the one or more holes 214 to advantageously reduce the work and precision required from each of the second drill 230 and the third drill 240.

In some embodiments, the second drill 230 is configured to move in a lateral direction 236 (e.g., up/down/left/right) with respect to substrate support 204. In some embodiments, the third drill 240 is configured to move in a lateral direction 246 (e.g., up/down/left/right) with respect to substrate support 204. In some embodiments, the second drill 230 is configured to rotate with respect to the substrate 208 along a central axis 234 of the second drill 230. In some embodiments, the third drill 240 is configured to rotate with respect to the substrate 208 along a central axis 244 of the third drill 240. The first drill 220, the second drill 230, and the third drill 240 may be disposed inside or outside the enclosure 210.

In some embodiments, the central axis 234 of the second drill 230 is parallel to the central axis 212 of the substrate 208 when the substrate 208 is in a two-side drilling position. In some embodiments, the central axis 244 of the third drill 240 is parallel to the central axis 212 of the substrate 208 when the substrate 208 is in a two-side drilling position. In some embodiments, the second drill 230 and the third drill 240 are laser drills configured to direct photon energy 332 and photon energy 342, respectively, to remove material from the substrate 208 to form the one or more holes 214. In some embodiments, the second drill 230 has a plurality of laser heads to at least partially form multiple holes of the one or more holes 214 simultaneously. In some embodiments, the third drill 240 has a plurality of laser heads to at least partially form multiple holes of the one or more holes 214 simultaneously.

FIG. 6 depicts a schematic partial isometric view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure. The substrate support 204 is not shown in FIG. 6 to aid in visibility. In some embodiments, the one or more holes 214 include a plurality of sets of holes. In some embodiments, the plurality of sets of holes of the one or more holes 214 includes a first set 610, a second set 620, and a third set 630. In some embodiments, the second drill 230 is configured to drill the first set 610 of the plurality of sets of holes and then finishes another set of the plurality of sets of holes and continues repetitively until all of the one or more holes 214 are partially drilled from the first side 250 of the substrate 208. In some embodiments, the third drill 240 is configured to drill the second set 620 of the plurality of sets of holes and then finishes another set of the plurality of sets of holes and continues repetitively until all of the one or more holes 214 are partially drilled from the second side 260 of the substrate 208.

The second drill 230 and the third drill 240 are each configured to at least partially form all of the one or more holes 214 so that together, the second drill 230 and the third drill 240 form the one or more holes 614. In some embodiments, as shown in FIG. 6 , the second drill 230 is configured to at least partially drill the first set 610 of the one or more holes 214 simultaneously while the third drill 240 is configured to at least partially drill the second set 620 of the one or more holes 214. In some embodiments, the second drill 230 and the third drill 240 do not simultaneously form the same hole of the one or more holes 214.

In some embodiments, the substrate 208 rotates about the central axis 212 after drilling a set of the plurality of sets of holes using at least one of the second drill 230 and the third drill 240. In some embodiments, at least one of the second drill 230 or the third drill 240 moves (e.g., rotationally or laterally with respect to the substrate 208) between drilling of each set of the plurality of sets of holes. In some embodiments, the second drill 230 and the third drill 240 may move in a combination of lateral and rotation directions between each set of the plurality of sets of holes.

Each of the first set 610, the second set 620, and the third set 630 may include two or more holes of the one or more holes 214 (sets of two holes shown in FIG. 6 ). In some embodiments, the second drill 230 is configured to at least partially drill each hole of the first set 610 simultaneously. In some embodiments, the third drill 240 is configured to at least partially drill each hole of the second set 620 simultaneously. In some embodiments, the second drill 230 is configured to at least partially drill each hole of the first set 610 simultaneously with the third drill 240 at least partially drilling each hole of the second set 620. One or more of the substrate 208, the second drill 230, or the third drill 240 may be moved to at least partially form the third set 630.

FIG. 7 depicts a schematic side view of a two-side hole forming apparatus in accordance with some embodiments of the present disclosure. As depicted in FIG. 7 , the one or more laser drills 215 comprises a single laser drill or single array of laser drills, for example the first drill 220, coupled to a sidewall of the enclosure 210. In some embodiments, the one or more laser drills 215 comprises a single laser drill or single array of laser drills coupled to a top wall of the enclosure 210 and configured for double sided drilling. In some embodiments, the substrate support 204 may be configured to rotate about an elongate axis 710 so that the one or more laser drills 215 selectively face the first side 250 or the second side 260 of the substrate 208. In some embodiments, the elongate axis 710 is perpendicular to the central axis 212. As such, in some embodiments, double sided drilling may be achieved without the second drill 230 and the third drill 240.

Referring back to FIG. 1 , in some embodiments, forming the one or more holes comprises forming one or more rough holes having a first size through the substrate. In some embodiments, the one or more rough holes may be formed via the percussion drilling process using the one or more laser drills or a mechanical drilling process. The percussion drilling process generally comprises repeatedly pulsing the one or more laser drills with a pulse energy for a pulse duration. With each pulse, a photon beam is directed at the substrate to remove material. In some embodiments, the one or more laser drills direct a photon beam over a first set of one or more rough holes to be formed. In some embodiments, for single-side drilling, the pulses are repeated until the first set of one or more rough holes are formed through the substrate. The mechanical drilling process may generally comprises using a rotary tool to form the one or more rough holes.

FIG. 8 depicts a flowchart of a method 800 of forming holes in a substrate for use in a process chamber in accordance with some embodiments of the present disclosure. The inventors have observed that laser drilling may become inefficient when drilling from the first side all the way through the substrate for certain substrate thicknesses. The method 800 at 802 includes using one or more laser drills (e.g., one or more laser drills 215) to drill the substrate (e.g., substrate 208) from a first side (e.g., first side 250) of the substrate to a first location between the first side and a second side (e.g., second side 260) of the substrate to form one or more rough holes partially through the substrate. In some embodiments, the substrate has a thickness of about 5 mm to about 20 mm. In some embodiments, the substrate has a thickness of about 8 to about 12 mm. In some embodiments, the first location is a location after which drilling speed via the one or more laser drills would be less than a threshold drilling speed. In some embodiments, the threshold drilling speed is about 0.1 mm per second or faster. In some embodiments, the first location is about halfway between the first side and the second side, so that, for example, the one or more rough holes extend about 40 percent to about 60 percent of the thickness of the substrate. In some embodiments, the first location is less than 8 mm from the first side. In some embodiments, the first location is about 4 to about 6 mm from the first side.

The one or more rough holes may be drilled in any suitable manner to obtain a desired pattern. For example, the one or more rough holes may be drilled one hole at a time, a plurality of holes at a time, or sets of a plurality of holes at a time such as discussed above with respect to FIG. 6 . In some embodiments, the substrate may then subsequently be rotated so that the second side faces the one or more laser drills. In some embodiments, the substrate is rotated about an elongate axis (e.g., elongate axis 710) of a substrate support (e.g., substrate support 204).

At 804, the method 800 includes using the one or more laser drills to drill the substrate from the second side to at least the first location to form the one or more holes through the substrate. In some embodiments, the one or more holes have an aspect ratio similar to as discussed above. In some embodiments, the method 800 includes aligning the one or more laser drills with a location of the one or more rough holes prior to drilling the one or more holes from the second side. Aligning the one or more laser drills may include moving the one or more laser drills, moving the substrate, or moving both the one or more laser drills and the substrate. In some embodiments, a same laser drill or array of laser drills is used to drill the one or more rough holes from the first side and the one or more holes from the second side (see FIG. 7 ).

In some embodiments, the one or more laser drills may drill the substrate from the second side to the first location to form the plurality of holes through the substrate. In some embodiments, the one or more laser drills may drill the substrate from the second side past the first location to the first side to form the plurality of holes through the substrate. In some embodiments, a diameter of the one or more rough holes that extend from the first side partially through the substrate is less than a diameter of the plurality of holes. For example, the one or more rough holes may have a diameter of about 280 to about 295 microns while the plurality of holes may have a diameter of about 295 to about 305 microns. As such, drilling from the first side to the first location comprises blind drilling, and drilling from the second side comprises punch-through drilling or a combination of punch-through drilling and hole cleanup.

In some embodiments, at least one of the one or more laser drills or the substrate are moved (e.g. along lateral direction 202 or lateral direction 226) so that the one or more laser drills may direct a photon beam over a second set of one or more rough holes to be formed. The aforementioned process continues until all of the one or more rough holes are formed. In some embodiments, the percussion drilling process comprises a pulse duration of about 1.0 nanosecond or less. In some embodiments, the percussion drilling process is performed with a pulse energy of about 1.0 to about 8.0 millijoules. In some embodiments, the one or more holes are drilled at a speed of about 0.1 mm per second or faster, for example, to about 0.8 mm per second. The one or more holes are drilled faster via laser drilling as compared to conventional methods, advantageously providing a cost improvement.

In some embodiments, forming the one or more holes comprises using the one or more laser drills to finish the one or more rough holes via at least one of an ablation or trepanning process. An ablation process generally comprises removing material from a solid surface by irradiating the surface with photon energy. The ablation process may comprise a helical ablation process, where material is removed along a helical path. A trepanning process generally comprises moving a laser head in various geometries to remove material, for example, a circular geometry at various radii to remove material. In other examples, the trepanning process may comprise moving the laser head in a non-circular geometry, such as, an oval, a rectangular, or an amorphous geometry to remove material. As such, the ablation or trepanning process increases a diameter or cross-sectional area of the one or more rough holes from the first size to a larger second size while providing improved hole quality with reduced sub-surface damage.

Finishing via the ablation or trepanning process may comprise at least one of reducing a roughness of the one or more rough holes, increasing a roundness of the one or more rough holes, increasing a diameter or cross-sectional area of the one or more rough holes, or making the one or more rough holes more uniform in diameter or cross-sectional area with respect to each other (i.e., improved consistency from hole to hole). In some embodiments, a concentricity of the finished one or more holes is up to about 25% more concentric than a concentricity of the one or more rough holes. In some embodiments, a roundness of the one or more rough holes is about 25% greater than a roundness of the finished one or more holes. In some embodiments, a diameter of the finished one or more holes is up to about 50% larger than a diameter of the one or more rough holes. In some embodiments, the trepanning process or the ablation process comprises a pulse duration of about 1.0 nanosecond or less. In some embodiments, the trepanning process or the ablation process is performed with a pulse energy of about 1.0 to about 8.0 millijoules. In some embodiments, same ones of the one or more laser drills may be used to perform the percussion drilling and ablation or trepanning processes. In some embodiments, different ones of the one or more laser drills may be used to perform the percussion drilling and ablation or trepanning processes.

In some embodiments, where the substrate has a thickness of about 10.0 mm to about 20.0 mm, the one or more holes may be formed via double-side drilling from both sides (e.g., first side 250 and second side 260) of the substrate. In such embodiments, the one or more laser drills are disposed on either side of the substrate and are used to drill first partial holes (e.g., first partial holes 310) from a first side of the substrate to a first location (e.g., first location 308) disposed between the first side and a second side of the substrate and to drill second partial holes (e.g., second partial holes 320) from the second side of the substrate to the first location. In some embodiments, the first partial holes and the second partial holes are formed via an ablation process. In some embodiments, the first partial holes are formed via a percussion drilling process to form rough first partial holes, followed with an ablation process to finish (as described above) the rough first partial holes. In some embodiments, the second partial holes are formed via a percussion drilling process to form rough second partial holes, followed with an ablation process to finish (as described above) the rough second partial holes. In some embodiments, the first partial holes are drilled to a larger diameter than the second partial holes to provide tolerance so that the second partial holes may meet with the first partial holes.

FIG. 3A depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure. FIG. 3A depicts a hole of the one or more holes 214 after the ablation or trepanning process. In some embodiments, each hole of the one or more holes 214 has a substantially constant diameter. In some embodiments, the one or more holes 214 taper inward, outward, or both inward and outward from the first side 250 to the second side 260 (i.e., having a diameter or cross-sectional area that varies along a length of the hole). In some embodiments, a thickness 340 of the substrate 208 is about 0.70 mm to about 10.0 mm. In some embodiments, a diameter 330 of the one or more holes 214 is about 75.0 micrometers to about 750.0 micrometers.

FIG. 3B depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure. FIG. 3B depicts a hole of the one or more holes 214 formed via two-sided drilling after the ablation or trepanning process. In some embodiments, the one or more holes 214 include first partial holes 310 extending from the first side 250 of the substrate 208 to a first location 308 disposed between the first side 250 and the second side 260. In some embodiments, the one or more holes 214 include second partial holes 320 extending from the second side 260 to the first location 308 to intersect with the first partial holes 310. In some embodiments, the second partial holes 320 have a diameter or cross-sectional area greater than the first partial holes 310. In some embodiments, a thickness 350 of the substrate 208 is greater than about 10.0 mm.

FIG. 3C depicts a cross-sectional view of a portion of a substrate in accordance with some embodiments of the present disclosure. In some embodiments, the one or more holes 214 extend at an angle of incidence 360 with respect to a vertical axis 312 of the substrate 208. In some embodiments, the vertical axis 312 is parallel to the central axis 212. In some embodiments, the angle of incidence 360 is between about zero degrees to about ninety degrees. In some embodiments, the angle of incidence 360 is between about zero degrees to about sixty degrees. The one or more holes 214 may extend at the angle of incidence 360 to direct gas flow in a desired manner. At least one laser head of the one or more laser drills 215 may be rotated or tilted to direct a photon beam at the angle of incidence 360 to form the one or more holes 214 that extend at the angle of incidence 360 through the substrate 208.

FIG. 4 depicts a cross-sectional view of a substrate 400 in accordance with some embodiments of the present disclosure. The substrate 400 may be a gas delivery plate for use in a process chamber, for example, a dielectric etch chamber. In some embodiments, the substrate 400 is the substrate 208. The substrate 400 includes a first side 450 and a second side 460 opposite the first side 450. The substrate 400 includes one or more holes 410 extending from the first side 450 to the second side 460. The one or more holes 410 may be the one or more holes 214. In some embodiments, the one or more holes 402 may be arranged along one or more concentric rings. For example, the substrate 400 may include a first set of holes 402 of the one or more holes 410 along arranged along a first ring. The substrate 400 may include a second set of holes 404 of the one or more holes 410 arranged along a second ring disposed radially outward of the first ring. In some embodiments, the second ring is concentric with the first ring. In some embodiments, the substrate 400 may include a third set of holes 406 of the or more holes 410 arranged along a third ring disposed radially outward of the first ring and the second ring.

The first set of holes 402 may extend through the substrate 400 substantially vertically downward (as depicted in FIG. 4 ) or may extend off-axis, for example, radially inward and downward or radially outward and downward. The second set of holes 404 may extend through the substrate 400 substantially vertically downward (as depicted in FIG. 4 ) or may extend off-axis, for example, radially inward and downward or radially outward and downward. The third set of holes 406 may extend through the substrate 400 substantially vertically downward or may extend off-axis, for example, radially inward and downward (as depicted in FIG. 4 ) or radially outward and downward.

While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof. 

The invention claimed is:
 1. A method of forming one or more holes through a substrate for use as a process chamber component, comprising: using one or more laser drills to drill the substrate from a first side of the substrate to a first location between the first side and a second side of the substrate to form one or more rough holes partially through the substrate, wherein the first location is a location after which drilling speed via the one or more laser drills would be less than a threshold drilling speed; and using the one or more laser drills to drill the substrate from the second side to at least the first location to form the one or more holes through the substrate, wherein each of the one or more holes have an aspect ratio of about 30:1 to about 50:1, and wherein the substrate is a component for gas delivery or fluid delivery.
 2. The method of claim 1, wherein the substrate is drilled using at least one of a percussion drilling process, a trepanning process, or an ablation process.
 3. The method of claim 1, wherein the first location is about halfway between the first side and the second side.
 4. The method of claim 1, wherein the first location is about 4 to about 6 mm from the first side.
 5. The method of claim 1, wherein the substrate has a thickness of about 8 mm to about 12 mm.
 6. The method of claim 1, further comprising: rotating the substrate after drilling the substrate from the first side so that the second side of the substrate faces the one or more laser drills; and aligning the one or more laser drills with a location of the one or more rough holes prior to drilling the substrate from the second side.
 7. The method of claim 1, wherein the one or more laser drills comprise a single laser drill or a single array of laser drills.
 8. The method of claim 1, wherein drilling the substrate from the second side comprises finishing the one or more rough holes to form the one or more holes, wherein finishing the one or more rough holes comprises at least one of reducing a roughness of the one or more rough holes, increasing a roundness of the one or more rough holes, increasing a diameter of the one or more rough holes, or making the one or more rough holes more uniform in diameter with respect to each other.
 9. A method of forming one or more holes through a substrate for use as a process chamber component, comprising: placing the substrate on a substrate support; using one or more laser drills to drill the substrate from a first side of the substrate to a first location between the first side and a second side of the substrate to form a one or more rough holes partially through the substrate, wherein the first location is less than 8 mm from the first side, and wherein the first location is a location after which drilling speed via the one or more laser drills would be less than a threshold drilling speed; rotating the substrate along an elongate axis of the substrate support so that the second side of the substrate faces the one or more laser drills; and using the one or more laser drills to drill the substrate from the second side to at least the first location to form the one or more holes through the substrate, wherein each of the one or more holes have an aspect ratio of about 30:1 to about 50:1 and wherein the substrate is a component for gas delivery or fluid delivery.
 10. The method of claim 9, wherein drilling the substrate from the second side comprises using a percussion drilling process or an ablation process with a pulse duration of about 1.0 nanosecond or less with a pulse energy of about 1.0 to about 8.0 millijoules.
 11. The method of claim 9, wherein the substrate has a thickness of about 8 mm to about 12 mm.
 12. The method of claim 9, further comprising directing a purge gas to the one or more holes while forming the one or more holes.
 13. The method of claim 9, wherein the threshold drilling speed is about 0.1 mm per second or faster.
 14. The method of claim 9, wherein the one or more holes extend at an angle of incidence relative to a vertical axis of the substrate between about zero degrees to about ninety degrees.
 15. The method of claim 9, wherein the substrate is made of silicon, silicon carbide, aluminum, nickel, molybdenum, or a ceramic material. 